Researchers at Japan Advanced Institute of Science and
Technology (JAIST) have successfully fabricated suspended graphene
nanomesh in a large area by helium ion beam microscopy. Six nm
diameter nanopores were uniformly patterned on the 1.2 um long and
500 nm wide suspended graphene. By systematically controlling the
pitch (nanopore’s center to nanopore’s center) from 15 nm to 50 nm,
a series of stable graphene nanomesh devices were achieved. This
provides a practical way to investigate the intrinsic properties of
graphene nanomesh towards applications for gas sensing, phonon
engineering, and quantum technology.
