Angstrom multilayer metrology by combining spectral
measurements and machine learning

With the recent explosive demand for data storage,
ranging from data centers to various smart and connected devices,
the need for higher-capacity and more compact memory devices is
constantly increasing. As a result, semiconductor devices are now
moving from 2-D to 3-D. The 3-D-NAND flash memory is the most
commercially successful 3-D semiconductor device today, and its
demand for supporting our data-driven world is now growing
exponentially.